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Axcelis Technologies Inc

Common Name
Axcelis Technologies
Country
United States
Sector
Technology
Industry
Semiconductor Equipment & Materials
Employees
1,465
Ticker
ACLS
Exchange
Nasdaq
Description
Axcelis Technologies, Inc. is a semiconductor capital equipment company that designs, manufactures, and services ion implantation systems used in chip production. Axcelis Technologies focuses on enabl...

Axcelis Technologies's GHG Emissions Data Preview

In 2023, Axcelis Technologies completed a corporate carbon footprint assessment and publicly disclosed its greenhouse gas (GHG) emissions according to the GHG Protocol, covering Scope 1 (direct emissions from owned or controlled sources), Scope 2 (indirect emissions from purchased energy) and Scope 3 (indirect emissions across the value chain).

Axcelis Technologies has also provided a category-level breakdown for 10 out of 15 Scope 3 emissions categories, offering greater transparency into its value chain emissions.

Metric (tCO2e)2023202220212020-2019
Total Scope 1
3,411a
5,572a
N/A
Total Scope 2
Market-Based
1,669a
3,866a
N/A
Location-Based
5,812a
N/AN/A
Unspecified Calculation Method
N/AN/AN/A
Total Scope 3
2,015,713a
N/AN/A
Total Scope 1 Revenue Intensity (tCO2e/$M)
3.017a
6.0565a
N/A
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Verified Sources Behind Axcelis Technologies’s Greenhouse Gas (GHG) Emissions Data

Every figure on this dashboard has a transparent audit trail. With Tracenable, each data point is traceable back to its original source, viewable directly inside our platform.

a. Axcelis Technologies's ESG Report 2024
b. Axcelis Technologies's Sustainability Report 2020

Insights into Axcelis Technologies's Operational Emissions

In 2023, the total operational greenhouse gas (GHG) emissions of Axcelis Technologies amounted to 9,223 metric tons of CO2 equivalent. This figure includes both direct emissions from owned or controlled sources (Scope 1) and indirect emissions from purchased energy (Scope 2).a

Compared to 2022, the total operational greenhouse gas (GHG) emissions of Axcelis Technologies decreased by 2.28%, showing that the company has made progress in taking action to reduce the climate impact of its operations.a

Axcelis Technologies's Scope 1 Emissions Over Time

201920202022202301.5 k3 k4.5 k6 ktCO2e+24%+46%-39%
  • Total Scope 1
  • Year-over-Year Change

What are Axcelis Technologies's Scope 1 emissions?

In 2023, the total Scope 1 emissions of Axcelis Technologies were 3,411 metric tons of CO₂ equivalent (tCO₂e).a

Has Axcelis Technologies reduced its Scope 1 emissions over time?

Since 2019, Axcelis Technologies's Scope 1 emissions have increased by 10.86%, reflecting a rising long-term trend in Scope 1 emissions over time.ab

Compared to the previous year (2022), Axcelis Technologies's Scope 1 emissions decreased by 38.78%, highlighting the company's efforts to lower direct emissions from assets it owns or controls.a

What are Axcelis Technologies's Scope 2 emissions?

In 2023, Axcelis Technologies reported Scope 2 greenhouse gas (GHG) emissions of 1,669 tCO₂e using the market-based method and 5,812 tCO₂e using the location-based method.a

What methodology does Axcelis Technologies use for Scope 2 reporting?

In 2023, Axcelis Technologies reported its Scope 2 emissions using the market-based method and using the location-based method.a

Axcelis Technologies's Scope 2 Emissions Over Time

20202022202301.5 k3 k4.5 k6 ktCO2e
  • Total Scope 2 Location-Based
  • Total Scope 2 Market-Based
  • Total Scope 2 (Unspecified Calculation Method)

Insights into Axcelis Technologies's Value Chain Emissions

In 2023, Axcelis Technologies reported 2,015,713 metric tons of CO₂ equivalent (tCO₂e) of Scope 3 greenhouse gas (GHG) emissions, representing indirect emissions across its upstream and downstream value chain.a

The 2023 disclosure of Axcelis Technologies includes a breakdown across 10 of the 15 Scope 3 categories defined by the GHG Protocol, up from 0 in 2022, reflecting improved emissions accounting practices and greater transparency across the company's value chaina

Axcelis Technologies's Scope 3 Emissions Over Time

20230550 k1.1 M1.65 M2.2 MtCO2e
  • Total Scope 3
  • Year-over-Year Change

What are Axcelis Technologies's Scope 3 emissions?

In 2023, Axcelis Technologies reported total Scope 3 emissions of 2,015,713 metric tons of CO₂ equivalent (tCO₂e).a

Approximately 8.98% of these emissions originated from upstream activities such as purchased goods and capital goods, while 91.02% came from downstream activities like product use, distribution, and end-of-life treatment.a

What categories of Scope 3 emissions does Axcelis Technologies disclose?

In 2023, Axcelis Technologies reported emissions for 10 out of the 15 Scope 3 categories defined by the GHG Protocol.a

This reflects a high level of granularity and transparency in the company's emissions reporting.

What are the main sources of Axcelis Technologies's Scope 3 emissions?

In 2023, the largest contributors to Axcelis Technologies's Scope 3 emissions were:a

  • Use of Sold Products (Cat. 11): 1,833,412 tCO₂e (90.96%)
  • Purchased Goods and Services (Cat. 1): 113,162 tCO₂e (5.61%)
  • Downstream Transportation and Distribution (Cat. 9): 31,538 tCO₂e (1.56%)

Axcelis Technologies's Scope 3 Emissions by Categories

Purchased Goods andServices (Cat. 1)(5.6%)Use of Sold Products(Cat. 11)(91.0%)DownstreamTransportation andDistribution(Cat. 9)(1.6%)

Insights into Axcelis Technologies’s GHG Emissions Intensity Compared to Industry Peers

In 2023, Axcelis Technologies reported Scope 1 greenhouse gas (GHG) emissions of 3,411 tCO₂e and total revenues of USD 1,131 millions. This translates into an emissions intensity of 3.02 tCO₂e per millions USD.a

Axcelis Technologies's Scope 1 Emissions Intensity Compared to Peers

202002,00020,000200,000Scope 1 Emissions (tCO2e)1005002,00020,000100,000Revenues (Millions of USD)SumcoYear: 2024Scope 1: 87,000 tCO2eRevenue: $M 2,526Scope 1 Intensity: 34.44 tCO2e/$MSino-american Silicon ProductsYear: 2024Scope 1: 561 tCO2eRevenue: $M 2,432Scope 1 Intensity: 0.23 tCO2e/$MASMPTYear: 2024Scope 1: 1,100 tCO2eRevenue: $M 1,607Scope 1 Intensity: 0.68 tCO2e/$MTCL ZhonghuanYear: 2024Scope 1: 51,619 tCO2eRevenue: $M 3,894Scope 1 Intensity: 13.26 tCO2e/$MFoxsemicon Integrated TechnologyYear: 2024Scope 1: 459 tCO2eRevenue: $M 502Scope 1 Intensity: 0.91 tCO2e/$MDaqo New EnergyYear: 2023Scope 1: 290 tCO2eRevenue: $M 2,308Scope 1 Intensity: 0.13 tCO2e/$MPanjit InternationalYear: 2023Scope 1: 521 tCO2eRevenue: $M 414Scope 1 Intensity: 1.26 tCO2e/$MSUSS MicroTecYear: 2025Scope 1: 1,289 tCO2eRevenue: $M 591Scope 1 Intensity: 2.18 tCO2e/$MCamtekYear: 2024Scope 1: 265 tCO2eRevenue: $M 429Scope 1 Intensity: 0.62 tCO2e/$MNovaYear: 2024Scope 1: 925 tCO2eRevenue: $M 672Scope 1 Intensity: 1.38 tCO2e/$MACM Research ShanghaiYear: 2024Scope 1: 35 tCO2eRevenue: $M 771Scope 1 Intensity: 0.05 tCO2e/$MBE Semiconductor IndustriesYear: 2025Scope 1: 99 tCO2eRevenue: $M 695Scope 1 Intensity: 0.14 tCO2e/$MPiotechYear: 2023Scope 1: 11,415 tCO2eRevenue: $M 381Scope 1 Intensity: 29.99 tCO2e/$MGreatek ElectronicsYear: 2023Scope 1: 1,687 tCO2eRevenue: $M 442Scope 1 Intensity: 3.81 tCO2e/$MTokyo SeimitsuYear: 2024Scope 1: 1,967 tCO2eRevenue: $M 889Scope 1 Intensity: 2.21 tCO2e/$MSoitecYear: 2024Scope 1: 4,615 tCO2eRevenue: $M 1,056Scope 1 Intensity: 4.37 tCO2e/$MAixtronYear: 2025Scope 1: 127 tCO2eRevenue: $M 654Scope 1 Intensity: 0.19 tCO2e/$MKulicke and Soffa IndustriesYear: 2023Scope 1: 433 tCO2eRevenue: $M 742Scope 1 Intensity: 0.58 tCO2e/$MAmkor TechnologyYear: 2024Scope 1: 100,407 tCO2eRevenue: $M 6,318Scope 1 Intensity: 15.89 tCO2e/$MEntegrisYear: 2024Scope 1: 25,122 tCO2eRevenue: $M 3,241Scope 1 Intensity: 7.75 tCO2e/$MTeradyneYear: 2024Scope 1: 3,517 tCO2eRevenue: $M 2,820Scope 1 Intensity: 1.25 tCO2e/$MKLAYear: 2024Scope 1: 6,523 tCO2eRevenue: $M 9,812Scope 1 Intensity: 0.66 tCO2e/$MLam ResearchYear: 2024Scope 1: 91,681 tCO2eRevenue: $M 14,905Scope 1 Intensity: 6.15 tCO2e/$MApplied MaterialsYear: 2025Scope 1: 54,264 tCO2eRevenue: $M 28,367Scope 1 Intensity: 1.91 tCO2e/$MFormFactorYear: 2020Scope 1: 6,188 tCO2eRevenue: $M 694Scope 1 Intensity: 8.92 tCO2e/$MAxcelis TechnologiesYear: 2023Scope 1: 3,411 tCO2eRevenue: $M 1,131Scope 1 Intensity: 3.02 tCO2e/$M

How does Axcelis Technologies's GHG emissions intensity compare to its peers?

In 2023, Axcelis Technologies reported a Scope 1 emissions intensity of 3.02 tCO₂e per millions USD. Compared to the peer group median of 1.38, this places the company above its industry benchmark, indicating it is less carbon-efficient than most competitors.a

Where does Axcelis Technologies rank on GHG emissions intensity within its industry?

In 2023, Axcelis Technologies ranked 17 out of 25 companies in its industry peer group, based on Scope 1 emissions intensity (measured in tCO₂e per millions USD).a

Axcelis Technologies is therefore positioned in the mid-range of its industry, neither a clear leader nor a laggard in carbon efficiency.a

Insights into Axcelis Technologies's Total Carbon Footprint

In 2023, Axcelis Technologies reported a total carbon footprint of 2,024,936 metric tons of CO₂ equivalent (tCO₂e) across Scope 1, Scope 2, and Scope 3 emissions. This represents a 21,355.14% increase compared to 2022, suggesting a rise in emissions across its operations or value chain.a

The largest contributor to Axcelis Technologies's total carbon footprint was Scope 3 emissions, accounting for 99.54% of the company's total carbon footprint, followed by Scope 2 emissions at 0.29%.a

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