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ASML Holding NV

Common Name
ASML Holding
Country
Netherlands
Sector
Technology
Industry
Semiconductor Equipment & Materials
Employees
43,882
Ticker
ASML
Exchange
EURONEXT
Description
ASML Holding N.V. is a Dutch multinational corporation and a leading semiconductor company specializing in the development and manufacturing of photolithography machines essential for producing integr...

ASML Holding's GHG Emissions Data Preview

In 2025, ASML Holding completed a corporate carbon footprint assessment and publicly disclosed its greenhouse gas (GHG) emissions according to the GHG Protocol, covering Scope 1 (direct emissions from owned or controlled sources), Scope 2 (indirect emissions from purchased energy) and Scope 3 (indirect emissions across the value chain).

ASML Holding has also provided a category-level breakdown for 10 out of 15 Scope 3 emissions categories, offering greater transparency into its value chain emissions.

Metric (tCO2e)202520242023
2022 - 2017
Total Scope 1
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Total Scope 2
Market-Based
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Location-Based
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Total Scope 3
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Total Scope 1 Revenue Intensity (tCO2e/$M)
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Limited Data Preview
You are viewing a limited preview of ASML Holding’s GHG emissions dataset. The full dataset, available for download, includes Scope 1, 2, and 3 emissions with detailed category-level breakdowns, historical coverage back to 2019, and revenue-based intensity metrics for each scope.
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Verified Sources Behind ASML Holding’s Greenhouse Gas (GHG) Emissions Data

Every figure on this dashboard has a transparent audit trail. With Tracenable, each data point is traceable back to its original source, viewable directly inside our platform. Explore ASML Holding’s data sources below and access millions more through our Disclosure Search.

a. ASML Holding's Annual Report 2025
b. ASML Holding's Annual Report 2024
c. ASML Holding's Annual Report 2023

Insights into ASML Holding's Operational Emissions

In 2025, the total operational greenhouse gas (GHG) emissions of ASML Holding amounted to 176,000 metric tons of CO2 equivalent. This figure includes both direct emissions from owned or controlled sources (Scope 1) and indirect emissions from purchased energy (Scope 2).a

Compared to 2024, the total operational greenhouse gas (GHG) emissions of ASML Holding decreased by 30.08%, showing that the company has made progress in taking action to reduce the climate impact of its operations.ab

ASML Holding's Scope 1 Emissions Over Time

201920202021202220232024202506.5 k13 k19.5 k26 ktCO2e-31%+25%-10%+11%+22%+6%
  • Total Scope 1
  • Year-over-Year Change

What are ASML Holding's Scope 1 emissions?

In 2025, the total Scope 1 emissions of ASML Holding were 25,000 metric tons of CO₂ equivalent (tCO₂e).a

Has ASML Holding reduced its Scope 1 emissions over time?

Since 2019, ASML Holding's Scope 1 emissions have increased by 11.61%, reflecting a rising long-term trend in Scope 1 emissions over time.ab

Compared to the previous year (2024), ASML Holding's Scope 1 emissions increased by 6.38%, suggesting that the company faced challenges in reducing emissions from its directly owned or controlled operations.ab

What are ASML Holding's Scope 2 emissions?

In 2025, ASML Holding reported Scope 2 greenhouse gas (GHG) emissions of 1,000 tCO₂e using the market-based method and 151,000 tCO₂e using the location-based method.a

Has ASML Holding reduced its Scope 2 emissions over time?

Since 2019, ASML Holding's Scope 2 greenhouse gas (GHG) emissions (Location-Based) have decreased by 14.2%, reflecting a declining long-term trend in Scope 2 emissions over time.a

Compared to the previous year (2024), ASML Holding's Scope 2 emissions (Location-Based) fell by 33.83% in 2025, showing that the company has made progress in taking action to reduce the climate impact of its energy consumption.ab

What methodology does ASML Holding use for Scope 2 reporting?

In 2025, ASML Holding reported its Scope 2 emissions using the market-based method and using the location-based method.a

ASML Holding's Scope 2 Emissions Over Time

2019202020212022202320242025060 k120 k180 k240 ktCO2e
  • Total Scope 2 Location-Based
  • Total Scope 2 Market-Based

Insights into ASML Holding's Value Chain Emissions

In 2025, ASML Holding reported 11,617,000 metric tons of CO₂ equivalent (tCO₂e) of Scope 3 greenhouse gas (GHG) emissions, representing indirect emissions across its upstream and downstream value chain.a

The 2025 disclosure of ASML Holding includes a breakdown across 10 of the 15 Scope 3 categories defined by the GHG Protocol, matching the level of disclosure in 2024, demonstrating consistent Scope 3 emissions reporting coverage year over year.a

ASML Holding's Scope 3 Emissions Over Time

201920202021202220232024202504 M8 M12 M16 MtCO2e+16%+30%+4%+26%-20%-3%
  • Total Scope 3
  • Year-over-Year Change

What are ASML Holding's Scope 3 emissions?

In 2025, ASML Holding reported total Scope 3 emissions of 11,617,000 metric tons of CO₂ equivalent (tCO₂e).a

Approximately 44.51% of these emissions originated from upstream activities such as purchased goods and capital goods, while 55.49% came from downstream activities like product use, distribution, and end-of-life treatment.a

Has ASML Holding reduced its Scope 3 emissions over time?

Since 2019, ASML Holding's Scope 3 emissions have increased by 53.3%, reflecting a rising long-term trend in Scope 3 emissions over time.a

Compared to the previous year (2024), ASML Holding's Scope 3 emissions remained relatively stable, indicating that ASML Holding's emissions have plateaued with no significant change in its value chain footprint.a

What categories of Scope 3 emissions does ASML Holding disclose?

In 2025, ASML Holding reported emissions for 10 out of the 15 Scope 3 categories defined by the GHG Protocol.a

This reflects a high level of granularity and transparency in the company's emissions reporting.

What are the main sources of ASML Holding's Scope 3 emissions?

In 2025, the largest contributors to ASML Holding's Scope 3 emissions were:a

  • Use of Sold Products (Cat. 11): 6,443,000 tCO₂e (55.46%)
  • Purchased Goods and Services (Cat. 1): 4,373,000 tCO₂e (37.64%)
  • Capital Goods (Cat. 2): 408,000 tCO₂e (3.51%)

ASML Holding's Scope 3 Emissions by Categories

Purchased Goods andServices (Cat. 1)(37.6%)Capital Goods(Cat. 2)(3.5%)Use of Sold Products(Cat. 11)(55.5%)

Insights into ASML Holding’s GHG Emissions Intensity Compared to Industry Peers

In 2025, ASML Holding reported Scope 1 greenhouse gas (GHG) emissions of 25,000 tCO₂e and total revenues of USD 38,408 millions. This translates into an emissions intensity of 0.65 tCO₂e per millions USD.a

ASML Holding's Scope 1 Emissions Intensity Compared to Peers

2501,00020,000200,000Scope 1 Emissions (tCO2e)202002,00010,000100,000Revenues (Millions of USD)EPFAASM InternationalYear: 2024Scope 1: 2,500 tCO2eRevenue: $M 3,052Scope 1 Intensity: 0.82 tCO2e/$MKLAYear: 2024Scope 1: 6,523 tCO2eRevenue: $M 9,812Scope 1 Intensity: 0.66 tCO2e/$MLasertecYear: 2025Scope 1: 50 tCO2eRevenue: $M 1,748Scope 1 Intensity: 0.03 tCO2e/$MTokyo SeimitsuYear: 2024Scope 1: 1,967 tCO2eRevenue: $M 889Scope 1 Intensity: 2.21 tCO2e/$MTong HsingYear: 2023Scope 1: 718 tCO2eRevenue: $M 378Scope 1 Intensity: 1.90 tCO2e/$MEEElite Advanced LaserYear: 2024Scope 1: 430 tCO2eRevenue: $M 231Scope 1 Intensity: 1.86 tCO2e/$MLam ResearchYear: 2024Scope 1: 91,681 tCO2eRevenue: $M 14,905Scope 1 Intensity: 6.15 tCO2e/$MTokyo ElectronYear: 2024Scope 1: 21,000 tCO2eRevenue: $M 12,088Scope 1 Intensity: 1.74 tCO2e/$MPPPiotechYear: 2023Scope 1: 11,415 tCO2eRevenue: $M 381Scope 1 Intensity: 29.99 tCO2e/$MASMPTYear: 2024Scope 1: 1,100 tCO2eRevenue: $M 1,607Scope 1 Intensity: 0.68 tCO2e/$MFormFactorYear: 2020Scope 1: 6,188 tCO2eRevenue: $M 694Scope 1 Intensity: 8.92 tCO2e/$MFFFoxsemicon Integrated TechnologyYear: 2024Scope 1: 459 tCO2eRevenue: $M 502Scope 1 Intensity: 0.91 tCO2e/$MGreatek ElectronicsYear: 2023Scope 1: 1,687 tCO2eRevenue: $M 442Scope 1 Intensity: 3.81 tCO2e/$MKulicke and Soffa IndustriesYear: 2023Scope 1: 433 tCO2eRevenue: $M 742Scope 1 Intensity: 0.58 tCO2e/$MAnji MicroelectronicsYear: 2023Scope 1: 3 tCO2eRevenue: $M 174Scope 1 Intensity: 0.02 tCO2e/$MDiscoYear: 2024Scope 1: 6,525 tCO2eRevenue: $M 2,031Scope 1 Intensity: 3.21 tCO2e/$MAAACM Research ShanghaiYear: 2024Scope 1: 35 tCO2eRevenue: $M 771Scope 1 Intensity: 0.05 tCO2e/$MBE Semiconductor IndustriesYear: 2025Scope 1: 99 tCO2eRevenue: $M 695Scope 1 Intensity: 0.14 tCO2e/$MIQEYear: 2024Scope 1: 3,455 tCO2eRevenue: $M 148Scope 1 Intensity: 23.33 tCO2e/$MSoitecYear: 2024Scope 1: 4,615 tCO2eRevenue: $M 1,056Scope 1 Intensity: 4.37 tCO2e/$MInari AmertronYear: 2023Scope 1: 314 tCO2eRevenue: $M 290Scope 1 Intensity: 1.08 tCO2e/$MSumcoYear: 2024Scope 1: 87,000 tCO2eRevenue: $M 2,526Scope 1 Intensity: 34.44 tCO2e/$MMI TechnovationYear: 2023Scope 1: 68 tCO2eRevenue: $M 77Scope 1 Intensity: 0.88 tCO2e/$MApplied MaterialsYear: 2024Scope 1: 50,775 tCO2eRevenue: $M 27,176Scope 1 Intensity: 1.87 tCO2e/$MASML HoldingYear: 2025Scope 1: 25,000 tCO2eRevenue: $M 38,408Scope 1 Intensity: 0.65 tCO2e/$M

How does ASML Holding's GHG emissions intensity compare to its peers?

In 2025, ASML Holding reported a Scope 1 emissions intensity of 0.65 tCO₂e per millions USD. Compared to the peer group median of 1.8, this places the company below its industry benchmark, indicating it is more carbon-efficient than most competitors.a

Where does ASML Holding rank on GHG emissions intensity within its industry?

In 2025, ASML Holding ranked 6 out of 24 companies in its industry peer group, based on Scope 1 emissions intensity (measured in tCO₂e per millions USD).a

ASML Holding is therefore positioned in the mid-range of its industry, neither a clear leader nor a laggard in carbon efficiency.a

Insights into ASML Holding's Total Carbon Footprint

In 2025, ASML Holding reported a total carbon footprint of 11,793,000 metric tons of CO₂ equivalent (tCO₂e) across Scope 1, Scope 2, and Scope 3 emissions. This represents a 3.44% decrease compared to 2024, indicating progress in reducing its overall greenhouse gas output.ab

The largest contributor to ASML Holding's total carbon footprint was Scope 3 emissions, accounting for 98.51% of the company's total carbon footprint, followed by Scope 2 emissions at 1.28%.a

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